Modal Analysis of Micro-Electromechanical Systems

Abstract

Effects of ambient pressures on dynamics of two different micro cantilevers arrays were studied using ANSYS simulations. One array had substrate of N Type Silicon while other model was assigned Quartz as its substrate material, while the beams of both models had same material of polysilicon. Modal and Transient analyses were performed to obtain resonance frequencies and FRF curves of all beams. FRF curves were analyzed to obtain damping ratios and quality factors for each beam of both models. Comparison between resonance frequencies, Damping ratios and Quality factors of two arrays were to see the effects of substrate material over sensitivity of array. One of the geometric parameter (Gap height) was also studied under ambient pressures to check the dependency of energy dissipation mechanism over gap height of micro beams form their substrate.